Semiconductor ion emitter for mass spectrometry
AssigneePresident of Osaka University
InventorsTakekiyo Matsuo, Itsuo Katakuse, Hisashi Matsuda
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Abstract
A semiconductor ion emitter for a mass spectrometer, comprises an electrode having semiconductor whiskers provided on the conductive surface of a base. A process for manufacturing such semiconductor ion emitter, includes steps of evaporating gold onto a wire having a diameter of about 60 .mu.m, preheating the coated wire, and supplying a gas containing the semiconductor for growth of the whiskers on the gold plated wire. An apparatus for such process comprises a vacuum vessel for enclosing the wire, means for controllably heating the wire and means for controllably supplying a gas containing the semiconductor into the vacuum vessel.
Claims10
Ion emitter for mass spectrometry comprising a wire having a diameter of approximately 60 .mu.m and having a conductive metal peripheral surface, and a multiplicity of whiskers of semiconductor material projecting from said conductive metal peripheral surface of said wire.
Dependencies are inferred from the claim text.