Method of shipping and using semiconductor liquid source materials

A method of packaging for shipment and use ultra-high purity liquids used in the manufacture of semiconductor devices in a manner to minimize the possibility of contamination of the liquid including the avoidance of exposure to the atmosphere, said method comprising:

• positioning said liquid in a bubbler container made of quartz or other material which is highly inert with respect to the liquid, said container having an inlet tube connected thereto which extends into the interior of the container and terminates near the bottom of the container, said tube having an opening in its lower end so that gas may be applied to the upper end of the tube and be allowed to escape out of the lower end of the tube and bubble upwardly through the liquid, said container further having an outlet tube connected to the upper end of the container;
• forming a readily breakable inner seal across said tubes, said seal may be made of the same material that the container is made of;
• forming a second seal across said tube spaced outwardly from said inner seal, said outer seal being stronger than said inner seal and formed in a manner that will meet safety shipping regulations for said liquid including providing a positive seal that prevents leakage and can withstand an internal pressure of 15 PSI gauge;
• shipping said double sealed container to a user;
• and
• independently and sequentially breaking said inner and outer seals so that connections may be made to said tube to place said container in a using system after breaking said outer seal and without exposing said liquid to said atmosphere.

A method of acquiring and using high-purity liquids employed in connection with the manufacture of semiconductor devices comprising the steps of:

• acquiring an ultra high purity liquid material, pre-packaged in a bubbler comprising a closed container having an inlet tube which extends out the upper end of the container and into the lower end, and having an outlet tube extending out of the upper end of the container, each of said tubes having a seal on its outer upper end sufficient to meet shipping requirements including providing a positive seal which prevents leakage and can withstand an internal pressure of 15 PSI gauge, said container having an inner easily breakable seal across said tube spaced from said outer seal;
• independently breaking said outer seal without breaking said inner seal;
• connecting the upper end of said inlet and outlet tubes to the system employed in the manufacture of semiconductor devices;
• applying an inert gas to said connections and the inner upper ends of said inlet and outlet tubes to purge said tubes above said inner seals of moisture and atmosphere accumulating subsequent to said breaking of said outer seals;
• and
• externally breaking said inner seals without manual access to the interior of the tubes to expose said liquid material to said system without contamination of said material.

A method of packaging and using ultra-high purity liquids used in the manufacturing of semiconductor devices such as boron tribromide, phosphorous oxychloride, phosphorous tribromide, silicon tetrabromide, arsenic trichloride, arsenic tribromide, antimony petachloride and combinations thereof, in a manner to minimize the possibility of contamination of the liquid including the avoidance of exposure to the atmosphere, said method comprising:

• positioning said liquid in a bubbler container made of quartz or other material which is inert which respect to said liquid said container having an inlet tube which extends into said container adjacent the upper end of said container and terminates adjacent the lower end of said container so as to be immersed in said liquid and an outlet tube extending out of the upper end of said container, each of said tubes having an inner and an outer liquid-tight seal formed adjacent its upper end;
• shipping said container from the location where the liquid is added to the container to the user of the liquid, said seals being closed when the container is shipped;
• opening said outer seals and connecting the upper end of said inlet and outlet tubes to a system employed for the manufacture of semiconductor devices;
• applying purging means to said connections and the upper ends of said inlet and outlet tubes to purge said tubes above said inner liquid-tight seals of moisture and atmosphere accumulated therein;
• opening said inner seals by means disposed within said tubes and movable by external means, not requiring access to the interior of said tube, to expose said liquid to said system without exposing said liquid to the atmosphere around the container;
• and
• applying a carrier gas into the inlet tube, said gas traveling through said inlet tube, bubbling upward through said liquid and exiting said container through said outlet tube.

A method of packaging and using ultra-high purity liquids used in the manufacturing of semi-conductor devices such as boron tribromide, phosphorous oxychloride, phosphorous tribromide, silicon tetrabromide, arsenic trichloride, arsenic tribromide, antimony pentachloride and combinations thereof, in a manner to minimize the possibility of contamination of the liquid including the avoidance of exposure to the atmosphere, said method comprising:

• positioning said liquids in a bubbler container made of quartz or other material which is inert with respect to said liquid, said container having an inlet tube which extends into said container adjacent the upper end of said container and terminates adjacent the lower end of said container so as to be immersed in said liquid, and an outlet tube extending out of the upper end of said container, each of said tubes having a liquid-tight seal formed adjacent its upper end, shipping said container from the location where the liquid is added to the container to the user of the liquid with said seals being closed when the container is shipped;
• connecting the upper ends of said inlet and outlet tubes to a system employed for the manufacture of semiconductor devices;
• applying purging means to said connections and the upper ends of said inlet and outlet tubes to purge said tubes outwardly from said liquid-tight seals of moisture and atmosphere accumulated therein;
• opening said seals by means disposed within said tubes and movable by external means, not requiring access to the interior of said tube, to expose said liquid to said system without exposing said liquid to the atmosphere around the container;
• and
• applying a carrier gas into the inlet tube, said gas traveling through said inlet tube, bubbling upward through said liquid and exiting said container through said outlet tube.

A method of handling and utilizing an untra-high purity liquid used in the manufacturing of semiconductor devices such as boron tribromide, phosphorous oxychloride, phosphorous tribromide, silicon tetrabromide, arsenic trichloride, arsenic tribromide, antimony pentachloride and combinations thereof, in a manner to minimize the possibility of contamination of the liquid including the avoidance of exposure to the atmosphere, said method comprising:

• acquiring said liquid in a bubbler container from a supplier of said liquid, said container being made of quartz or other material which is inert with respect to said liqud, said container having an inlet tube which extends into said container adjacent the upper end of said container and terminates adjacent the lower end of said container so as to be immersed in said liquid, and an outlet tube extending out of the upper end of said container, each of said tubes having a liquid-tight seal formed adjacent its upper end, said container having been shipped from the location where the liquid is added to the container to the user of the liquid with said seals being closed when the container is shipped;
• connecting the upper end of said inlet and outlet tubes to a system employed for the manufacture of semiconductor devices while said seals remain closed;
• applying purging means to said connections and the upper ends of said inlet and outlet tubes to purge said tubes outwardly from said liquid-tight seals of moisture and atmosphere accumulated therein;
• opening said seals by means disposed within said tubes and movable by external means, not requiring access to the interior of said tube, to expose said liquid to said system without exposing said liquid to the atmosphere around the container;
• and
• applying a carrier gas into the inlet tube, said gas traveling through said inlet tube, bubbling upward through said liquid and exiting said container through said outlet tube.