Position measuring system

A measuring system for ascertaining a position of a movable member, the system comprising:

• spindle means movable axially in parallel with said movable member;
• a first electrode carried on said movable member;
• a second electrode carried on said spindle means, said first and second electrodes being arranged to be juxtaposed with one another to form a gap spacing therebetween;
• a power supply for applying an electric potential across said gap spacing;
• motor means for displacing said spindle means;
• means for sensing a voltage across said gap spacing to produce a control signal representing a distance therein, thereby controlling said motor means;
• and display means responsive to the rotation of said motor means to produce a numerical display representing a rotary displacement thereof.

A position measuring system comprising:

• (a) a sensing head;
• (b) support means for displacing said sensing head relative to a surface to be measured to detect a predetermined contact or proximity relationship thereof with said surface;
• (c) means for imparting a small vibration to said sensing heat;
• (d) means responsive to a modification in the mode of vibration caused in said sensing head upon establishing said predetermined contact or proximity relationship with said surface for producing an output signal;
• and
• (e) feed means for advancing said sensing head toward said surface and including an electric motor and a drive circuit therefor, and display means for indicating a rotary displacement of said electric motor, said drive circuit being associated with said means (d) for receiving said output signal in response to establishment of said relationship between said sensing head and said surface to deactuate said electric motor thereby halting the advancement of said sensing head.

A position measuring system comprising:

• (a) a sensing head;
• (b) support means for displacing said sensing head relative to a surface to be measured to detect a predetermined contact or proximity relationship thereof with said surface;
• (c) means for imparting a small vibration to said sensing head;
• (d) means responsive to a modification in the mode of vibration caused in said sensing head upon establishing said predetermined contact or proximity relationship with said surface for producing an open output signal, said means (c) including an electromechanical transducer attached to said sensing head and energized by a power supply to impart to said sensing head a high frequency vibration of a frequency in a range between 1 kHz and 50 kHz and an amplitude in a range between 0.1 to 10 .mu.m;
• and
• (e) feed means for advancing said sensing head toward said surface and including an electric motor and a drive circuit therefor, and display means for indicating a rotary displacement of said electric motor, said drive circuit being associated with said means (d) for receiving said output signal in response to establishment of said relationship between said sensing head and said surface to deactuate said electric motor thereby halting the advancement of said sensing head.

A device for detecting a contact of a solid surface with a contact sensing probe on an elongated stylus assembly having a stylus in a position measuring system, said device comprising:

• support means for carrying said stylus assembly to advance said probe towards said solid surface;
• vibration means for imparting a small vibration to said stylus in the axial direction thereof to reciprocate repetitively said probe toward and away from said solid surface with an amplitude of 0.1 and 10 .mu.m;
• and
• response means responsive to a modification in the mode of vibration of said stylus upon said probe establishing a predetermined contact or proximity relationship with said solid surface for producing an output signal, said vibration means including an electromechanical transducer attached to said stylus and energized by a power supply to impart to said stylus a high frequency vibration of a frequency in a range between 1 kHz and 50 kHz and an amplitude in a range between 0.1 to 10 .mu.m.

A device for detecting a contact of a solid surface with a contact sensing probe on an elongated stylus assembly having a stylus in a position measuring system, said device comprising:

• support means for carrying said stylus assembly to advance said probe towards said solid surface;
• vibration means for imparting a small vibration to said stylus in the axial direction thereof to reciprocate repetitively said probe toward and away from said solid surface with an amplitude of 0.1 and 10 .mu.m;
• response means responsive to a modification in the mode of vibration of said stylus upon said probe establishing a predetermined contact or proximity relationship with said solid surface for producing an output signal;
• feed means for advancing said stylus assembly toward said surface and including an electric motor and a drive circuit therefore;
• and
• display means for indicating a rotary displacement of said electric motor, said drive circuit being associated with said response means for monitoring said relationship between said sensing probe and said solid surface to deactuate said electric motor thereby halting the advancement of said stylus assembly.

A device for detecting a contact of a solid surface with a contact sensing probe on an elongated stylus assembly having a stylus in a position measuring system, said device comprising:

• support means for carrying said stylus assembly to advance said probe towards said solid surface;
• vibration means for imparting a small vibration to said stylus in the axial direction thereof to reciprocate repetitively said probe toward and away from said solid surface with an amplitude of 0.1 and 10 .mu.m;
• and
• response means responsive to a modification in the mode of vibration of said stylus upon said probe establishing a predetermined contact or proximity relationship with said solid surface for producing an output signal, said support means being adapted to carry said stylus assembly to displace said sensing probe over said surface in a scanning operation.

A device for detecting a contact of a solid surface with a contact sensing probe on an elongated stylus assembly having a stylus in a position measuring system, said device comprising:

• support means for carrying said stylus assembly to advance said probe towards said solid surface;
• vibration means for imparting a small vibration to said stylus in the axial direction thereof to reciprocate repetitively said probe toward and away from said solid surface with an amplitude of 0.1 and 10 micrometers;
• and
• response means responsive to a modification in the mode of vibration of said stylus upon said probe establishing a predetermined contact or proximity relationship with said solid surface for producing an output signal.