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US 4,288,835 AGranted
Pressure sensor
AssigneeThe Bendix Corporation
InventorsChen Yi Lee, Charles Tung-ming Wu, Mark A. Brooks, Robert E. Fallis
Life of this patent
Estimating the term…
Abstract
A pressure sensor including a pressure capsule such as a dual diaphragm quartz capacitance pressure capsule and structure for supporting and sealing same within the pressure environment to be measured. The pressure capsule having two parallel quartz plates spaced by a dielectric ring forming a vacuum chamber therein. The structure providing a force balanced support for compressively loading the pressure capsule through the dielectric ring. The structure further having transfer port therein to communicate the pressure environment to both plates.
Claims20
A pressure sensor comprising:
- a pressure capsule means for generating a signal indicative of the pressure of the environment applied thereto, having parallelly situated and separated first and second pressure receiving surfaces, each surface having a pressure responsive region thereon which deflect in response to said pressure of the environment to be sensed;
- said pressure receiving surfaces being spaced by a ring of dielectric material wherein the areas of said surfaces interior to said dielectric ring correspond to said pressure responsive regions;
- said capsule further including electrical contacts located outside of said dielectric ring;
- housing means for enclosing said pressure capsule within a pressure receiving cavity located therein, said housing means having port means in fluid communication between said environment and said pressure receiving cavity for communicating said pressure thereto;
- support means located within said pressure receiving cavity interposing said housing and said first and said second pressure receiving surfaces;
- for compressive loading said capsule wherein the loading forces imparted to each of said pressure responsive regions are directed through said directly ring;
- transfer port means located within said housing means for communicating said environment to be sensed to both of said pressure responsive regions;
- signal conditioning means electrically connected to said pressure capsule means responsive to said signal for generating an output signal indicative of the magnitude of said pressure.
5 more elements
A pressure sensor comprising:
- a pressure capsule means for generating a signal of the pressure of the environment applied thereto having parallelly situated first and second pressure receiving surfaces, each of said surfaces having a centrally located circular pressure responsive region deflectable in response to the pressure of the environment to be sensed;
- said pressure receiving surfaces being spaced by a ring of dielectric material wherein the areas of said surfaces interior to said dielectric ring correspond to said pressure responsive regions;
- said capsule further including electrical contacts located outside of said dielectric ring;
- a metallic housing having a bottom and wall attached to said bottom forming a cup-like cavity therein, a circumferential shoulder located interior to said wall and spaced apart from a first surface of said bottom adjacent to said cup-like cavity, a port extending from said bottom oppositely situated from said first surface having a passage extending through to said cup-like cavity;
- a base, having a second surface, adapted to fit upon said shoulder for closing said cup-like cavity and for forming a pressure receiving cavity between said first surface of said bottom and said second surface for receiving said pressure capsule means, said pressure receiving cavity located in pressure communication with said passage;
- support means interposing said first surface and said first pressure receiving surface and said second surface and said second pressure receiving surface for circumferentially and compressively supporting said pressure capsule means circumferentially through said dielectric ring and for developing a circumferential pressure tight seal about each said circumferential support;
- passage means located within said housing and said base linking said housing and said base for communicating the pressure to be sensed from a portion of said pressure receiving cavity proximate said first pressure responsive region to a portion of said pressure receiving cavity proximate said second pressure responsive region;
- and
- signal conditioning means electrical connected to said pressure capsule means responsive to said signal for generating an output signal indicative of the magnitude of said pressure.
6 more elements
Dependencies are inferred from the claim text.