High voltage MOSFET with doped ring structure
AssigneeXerox Corporation
InventorRam S. Ronen
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Abstract
Integrated monlithic arrays of high voltage metal oxide semiconductor field effect transistors having closed geometry grounded peripheries for interdevice isolation are able to function as drivers that may be switched on and off. The HVMOSFET included DMOS-like structures with separate channel and drift regions, closed geometry configurations with center drains, and split oxide topography having relatively thin oxide under a field plate and over a drift region for surface depletion and high voltage inversion preclusion respectfully. The infra described HVMOSFET includes doping the areas between the field plates, gates and drain electrodes for the purpose of minimizing the problem of series resistance inherent in HVMOSFET'S with spatial gaps between the surface electrodes.
Claims25
A high voltage MOSFET in an integrated monolithic array on a substrate with a closed geometry configuration including a drain area having a relative center axis introduced in the substrate, a source area introduced in the substate relatively adjacent to the drain area, a channel area introduced in the substrate between the source area and the drain area, and a drift area introduced in the substrate between the channel area and the drain area, comprising:
- (a) field plate means relatively disposed in a first layer of relatively thick oxide over the drift area for application of a potential through the first layer of thick oxide to the drift area for controlling the breakdown voltage as between the source and drain area by contouring the field lines to bend away from the drain area;
- (b) gate electrode means relatively disposed in a second layer or relatively thin field oxide over the channel area for controlling the potential and for turning on and off the potential as between the source and drain areas and;
- (c) ring means implanted in the substrate to be relatively aligned with the spatial gaps occurring between said field plate means and said gate electrode means as doped areas for reducing resistance in the spatial gaps by providing a conductive path for carriers as between said gate electrode means and said field plate means.
A HV metal oxide semiconductor FET structure for a driver array having a monolithic integrated closed geometry configuration on a substrate, comprising;
- (a) first means having a relative center axis implanted in the substrate for function as a drain region, second means implanted in the substrate relatively adjacent to said first means for function as a source region, third means implanted in the substrate relatively interdisposed between said second and first means for function as a channel region, and fourth means implanted in the substrate relatively interdisposed between said third and first means for function as a drift region;
- (b) field means relatively embedded in a first layer of relatively thick oxide above fourth means for applying a potential to said fourth means for controlling the breakdown voltage as between said second and first means by contouring the field lines to bend away from the drain area, and
- (c) gate means relatively embedded in a second layer of relatively thin oxide over said third means for controlling the potential and for turning on and off the current between said first and second means;
- and;
- (d) ring means relatively disposed in the substrate to be aligned with the gaps occurring between said field means and said gate means as doped areas for reducing resistance in the spatial gaps by providing a conductive path for electrons as between said gate means and said field means.
Dependencies are inferred from the claim text.