US 4,288,284 AGranted

Method of producing housing element for quartz crystal oscillator

AssigneesMatsushima Kogyo Kabushiki Kaisha, Kabushiki Kaisha Suwa Seikosha

InventorsMasatoshi Kobayashi, George Shimakawa, Yukio Hara, Hiroyuki Fujii

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Abstract

A quartz crystal oscillator package comprising a quartz crystal vibrator leaf enclosed in an evacuated housing. The vibrator leaf frame is sandwiched and sealed between a pair of housing elements formed by etching at one time the periphery of each housing element and at another time etching a concave portion in each housing element. Opposed concave portions provide the internal volume wherein the vibrator leaf is sealed under vacuum. Using heat and vacuum, a metal film deposited on the sealing surfaces of the housing elements fuses with a binder material to form a eutectic alloy seal. A flat package having small size, high structural strength, an excellent hermetic seal, and high internal vacuum is produced by this method.

Claims6

Dependent claims

A method for producing a housing element for a thin, flat quartz crystal oscillator package, said element being formed from planar material having a finite thickness, and having a recessed concave portion therein, comprising the steps of:

(a) coating the opposed planar surfaces of said planar material with a masking film, said masking film edges defining the peripheral edges of said housing element and being resistant to chemical etching;
(b) chemically etching said planar surfaces whereby the peripheral edge portions of said housing element are etched away;
(c) removing said masking film to expose a defined portion of one of said planar surfaces;
(d) chemically etching said defined portion to produce said recessed concave portion in said housing element,
whereby the time allowed for etching said peripheral edges and said recessed concave portions can be independently determined.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application: 06/141,025Filed 17 Apr 1980 · division
Priority: JP 52/1458635 Dec 1977
Granted: 8 Sep 1981
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

H03H 9/1021
The enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device: the BAW device…
G04F 5/063
Using piezoelectric resonators: constructional details
H03H 3/02
For the manufacture of electromechanical resonators or networks: for the manufacture of piezoelectric or electrostrictive resonators or networks
H03H 9/0595
Holders or supports: the holder support and resonator being formed in one body