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US 4,287,772 AGranted
Strain gage transducer and process for fabricating same
AssigneeGulton Industries, Inc.
InventorsCarlyle A. Mounteer, Ronald L. Poteet
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Abstract
A transducer which includes a metal strain gage material formed on a flexible monocrystalline silicon diaphragm is disclosed. The transducer is fabricated to a large extent with semiconductor processing steps. Gold is diffused into a platinum-tungsten gage material. This allows the gage material to be chemically etched in the presence of other metals to define the active gage resistors. In the presently preferred embodiment, these resistors are formed over thin areas of the diaphragm to provide increased linearity and sensitivity.
Claims5
A strain gage transducer comprising:
- a monocrystalline silicon substrate having a first and second surface;
- a silicon dioxide layer disposed on said first surface of said silicon substrate;
- a plurality of platinum alloy strain gage resistors formed on said silicon dioxide layer;
- a plurality of gold leads disposed over said silicon dioxide layer interconnecting said resistors;
- whereby a low cost, high performance transducer is realized.
2 more elements
Dependencies are inferred from the claim text.