Control circuitry for maintaining forward and reflected transmission line power at a predetermined safe level
AssigneeThe Perkin-Elmer Corporation
InventorDonald L. Quick
Life of this patent
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AssigneeThe Perkin-Elmer Corporation
InventorDonald L. Quick
Estimating the term…
Circuitry for controlling the power output of an R.F. generator for regulating the forward power transmitted into a load of varying impedance, such as an R.F. sputtering target, and for limiting reflected power to a safe predetermined level. Forward power is controlled by circuitry that compares the voltage across the target with a predetermined reference voltage and the amplified output is applied to the signal generator control circuitry. Reflected power is measured by a sensor that outputs a proportional D.C. signal that is compared with a predetermined threshold voltage. Whenever the reflected power signal exceeds this threshold, it removes the effect of the target voltage input signal so that the amplified control signal to the R.F. generator is a function only of the reflected power.
Power control circuitry for controlling the power produced by an A.C. generator, the control circuitry comprising:
Power control circuitry for controlling the power produced by an A.C. generator comprising:
Dependencies are inferred from the claim text.