Liquid immersion apparatus for minute articles
AssigneeThe United States of America as represented by the Administrator of the National Aeronautics and Space Administration
InventorsJewell G. Belcher, Jr., Ben R. Hollis, Jr.
Life of this patent
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Abstract
Apparatus is disclosed for immersing minute integrated circuit chips in an etching solution in manufacturing integrated circuits during research and development. The apparatus includes holder member C having a handle 24 and basket support 26 for carrying a removable unitary basket A and lid structure B wherein fluid flow-through passages 20 are formed and wherein graduated openings 28 in the handle provide for adjustably supporting the basket in a beaker at a desired level.
Claims4
Apparatus for immersing minute integrated circuit chips in an etching solution comprising:
- a basket member having an open top and side and bottom walls;
- a plurality of minute fluid passages formed in said side and bottom walls of the said basket member;
- a removable lid member for enclosing said open top of said basket member having a plurality of minute fluid passages formed therein preventing air pockets in said basket during use;
- said fluid passages being dimensioned to retain said minute chips in said container against buoyancy and solution turbulence while allowing complete circulation of fluid through the interior of said basket and outwardly through said lid member;
- said basket and lid members being constructed of a non-corrrosive frictional material and being dimensioned relative to one another affording a frictional fitting therebetween to provide a unitary structure whereby said lid member is retained on said basket member against fluid pressure during use;
- a holder member including an upstanding handle portion;
- basket support means carried adjacent one end of said handle portion for supporting and retaining said basket member for immersion;
- and
- said handle portion including a plurality of vertically spaced attachment means for adjustably securing said holder assembly to associated structure whereby said basket member is supported in said solution at a desired level therein.
Dependencies are inferred from the claim text.