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US 4,286,277 AGranted
Planar indium antimonide diode array and method of manufacture
AssigneeThe United States of America as represented by the Secretary of the Army
InventorRandolph E. Longshore
Life of this patent
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Abstract
An improved diode array and method of manufacture is provided by the diffon of cadmium from an indium-cadmium alloy through a silicon diode mask into bulk indium-antimonide to form a planar structure.
Claims6
A photodiode comprising:
- a wafer of n-type indium antimonide doped with telluride having a carrier concentration of 2.times.10.sup.15 and a mobility between 1.5 and 2 times 10.sup.5 ;
- said wafer having a planar surface;
- isolated pockets of p-type material imbedded in said wafer having exposed contact surface areas coplanar with said planar surface;
- a layer of silicon oxide covering said planar surface and contact surface except for a small percentage of said contact surface;
- and
- a separate electrode at each pocket covering and contacting said small percentage of contact surface and at least a continuous narrow strip of said silicon oxide surrounding said small percentage of contact surface, wherein each electrode comprises:
- a thin layer of a noble metal covering only said small percentage of contact surface area, a layer of chromium covering said noble metal and some of the surrounding silicon oxide, and a layer of gold covering said chromium.
4 more elements
Dependencies are inferred from the claim text.