Two-coordinate positioning device
OwnerRiessland Eberhard, Helmut Beyer +1inventors
InventorsRiessland Eberhard, Helmut Beyer, Erich Kossman
Life of this patent
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Abstract
A positioning device with two coordinates, for the moving of two components relative to each other. The positioning device with two coordinates serves for the exact positioning of a tool or workpiece, preferably of semi-conductor discs, for the purpose of checking or fabricating in the course of the manufacturing process.
Claims11
A two coordinate positioning device comprising a passive component having a first and a second active surface spaced a fixed distance in a direction transverse to the active surfaces from each other, said first active surface having spaced ridges of magnetizable material extending in the direction of a first coordinate and said second active surface having spaced ridges extending in the direction of a second coordinate;
- and an active component having only two electromagnetic pole systems, one of said two pole systems having on a surface thereof engaging said first active surface of said passive component ridges of magnetizable material extending in the same direction as those on said first active surface, the other of said electromagnetic pole systems being spaced in said transverse direction from said one pole system and having on a surface thereof engaging said second active surface of said passive component spaced ridges of magnetizable material extending in the same direction as those on said second active surface, and a connecting member connecting said spaced pole systems to each other, whereby said ridges of said pole systems cooperate with those on said active surfaces to generate a relative movement of said components in the direction of one or the other of said coordinates upon imparting timed impulses to the respective pole system.
Dependencies are inferred from the claim text.