Method of detecting broken window foil of apparatus for treating waste gas with irradiation
AssigneesEbara Corporation, Shin Nippon Seitetsu Kabushiki Kaisha
InventorsShinji Aoki, Keita Kawamura, Tsutomu Higo, Hitoshi Kimura, Yasuhiro Sawada, Tsutomu Katayama, Katsumi Kengaku
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Abstract
A method of detecting a broken foil that closes the opening of the window of the reaction vessel of an apparatus for treating waste gas with irradiation is disclosed. The detection is accomplished by monitoring a change in the window cooling gas.
Claims11
A method of detecting the breakage of a window-foil that closes the radiation inlet opening of the reactor of an apparatus for treating waste gas by irradiation, said radiation being emitted from the radiation generator of said apparatus through another window-foil that closes the radiation outlet opening of the radiation generator to provide incident radiation into said reactor through which the waste gas to be irradiated flows, characterized in that said method comprises
- forming a closed fluid flow system including the space between the two window-foils,
- flowing a cooling fluid through the closed system such that cooling fluid is caused to flow over both of the window-foils whereby to cool the window-foils,
- monitoring at least one of the physical parameters of the cooling fluid, and
- producing a response to a change in such physical parameter that is indicative of a break in the window-foil that closes the radiation inlet opening of the reactor.
A system for detecting a break in a radiation penetrable window in a reaction chamber comprising
- a reaction chamber having walls,
- a foil window in a wall of said reaction chambers,
- a generator of radiation,
- a foil window in said generator of radiation aligned with and spaced from said first mentioned foil window whereby radiation from said radiation generator may pass from said radiation generator into said reaction chamber,
- means for defining a closed volume including the space between said foil windows,
- means for flowing cooling fluid for said foil windows into said space and over said foil windows, and
- means for monitoring changes in at least one physical parameter of the cooling fluid due to a break in said first mentioned foil window.
Dependencies are inferred from the claim text.