Electron microscope
AssigneeHitachi, Ltd.
InventorsShigeto Isakozawa, Kazuo Shii
Life of this patent
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Abstract
The electron beam having penetrated a sample is projected on a field limiting plate having an opening by means of an objective lens. That part of the electron beam which has passed through the opening of the field limiting plate, is projected upon a viewing screen by means of an image forming lens system. An electron beam deflection system is disposed between the hind focal point of the objective lens and the field limiting plate, the system having its deflection center at the hind focal point of the objective lens.
Claims10
An electron microscope comprising means for producing an electron beam;
- means for directing said electron beam to a sample whereby said beam penetrates said sample;
- an objective lens disposed in the path of said beam;
- first means for deflecting the transmitted beam with the hind focal point of said objective lens set substantially as the deflecting center so as to select the observation field of said sample;
- a viewing screen on which the deflected beam is cast;
- and second means for deflecting said electron beam directed at said sample in response to the deflection of said transmitted beam by said first means.
An electron microscope comprising means for producing an electron beam;
- means for directing said electron beam to a sample whereby said beam penetrates said sample;
- an objective lens disposed in the path of the transmitted beam to form an ordinary image of the transmitted electrons in a first predetermined position;
- first means disposed between the hind focal point of said objective lens and said first predetermined position to deflect said transmitted beam, with the deflecting center of said transmitted beam located substantially at said hind focal point of said objective lens so as to select the observation field of said sample;
- a field limiting plate disposed at said first predetermined position and having an opening through which a part of said transmitted beam passes;
- an image forming lens for projecting the ordinary image of the transmitted electrons formed in said opening upon a second predetermined position on a magnified scale;
- means for varying the focal distance of said image forming lens;
- a viewing screen disposed in said second predetermined position;
- and second means for deflecting the electron beam directed at said sample in proportion to the deflection of said transmitted beam.
Dependencies are inferred from the claim text.