Vapor delivery control system and method

Abstract

A method is disclosed for controlling the delivery of vapor from a bubbler containing a supply of liquid through which a carrier gas is bubbled and from which bubbler vapor is delivered in a vapor stream entrained with the carrier gas. The method comprises the steps of sensing the ratio of vapor to carrier gas in the vapor stream and applying heat to the liquid within the bubbler at rates relative to the sensed ratios of vapor to carrier gas being delivered from the bubbler in a vapor stream to hold the ratio constant. A vapor delivery control system is also disclosed which comprises a vaporizer, a heater thermally coupled with the vaporizer, and means for maintaining a supply of liquid in the vaporizer. The system further includes means for introducing a carrier gas into the vaporizer, means for conducting the carrier gas and vapors of the liquid entrained with the carrier gas from the vaporizer, means for sensing the ratio of vapor to carrier gas being conducted from the vaporizer, and means for controlling the heater responsive to the ratio of vapor to carrier gas sensed by the sensing means to hold the ratio constant.

Dependencies are inferred from the claim text.