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US 4,264,803 AGranted
Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
AssigneeUnion Carbide Corporation
InventorJulius S. Shinko
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AssigneeUnion Carbide Corporation
InventorJulius S. Shinko
Estimating the term…
Resistance-heated vaporization boats for the vacuum vaporization of metals, such as aluminum, chromium, copper or the like, are made by machining a boat cavity in at least one side of a graphite bar. The bar is totally encapsulated over its entire outer surface, including the boat cavity, with a continuous coating of pyrolytic boron nitride (PBN). The PBN coating is removed from areas at both ends of the bar to provide electrical contact zones for connecting the bar to a power source. The sides and ends of the boat cavity have smooth contours without sharp corners and the ends of the cavity have a hemispherical configuration to resist longitudinal expansion of the PBN coating thereby preventing separation of the PBN coating from the surface of the graphite bar. The PBN coating is deposited from a gas at a temperature of 1750.degree. C. to 2300.degree. C. and has a thickness of at least 0.010 inch.
An improved metal vaporization boat comprising a graphite bar having a depression on at least one side of said bar, said bar being covered on its entire outer surface, including said depression, with a continuous coating of pyrolytic boron nitride, except for areas at both ends of said bar which are devoid of said pyrolytic boron nitride coating to provide for electrical contact with the graphite of said bar, the sides and ends of said depression having smooth contours without sharp corners and said ends having a hemispherical configuration to resist longitudinal expansion of said pyrolytic boron nitride coating.
A piece of graphite having at least one depression on its surface and being covered over substantially all of the outer surface of said graphite piece, including said depression, with a continuous layer of pyrolytic boron nitride, the sides and ends of said depression having smooth contours without sharp corners and said ends having a hemispherical configuration to resist expansion of said pyrolytic boron nitride coating.
Dependencies are inferred from the claim text.