# US 4,264,407 A · Lateral pulling growth of crystal ribbons and apparatus therefor

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- Number: US 4,264,407 A
- Document ID: US4264407A
- Status: Granted
- Kind: A
- Application number: 05/864,489
- Filed: 1977-12-27
- Granted: 1981-04-28
- Earliest claimed: 1975-11-14
- Assignees: Mitsubishi Kinzoku Kabushiki Kaisha; Japan Silicon Co., Ltd.
- Inventors: Taro Shudo; Bosshi Kudo; Yasushi Tamai
- Web page: https://patentgrep.com/patent/US4264407A

## CPC

- C30B 15/14: Heating of the melt or the crystallised materials
- C30B 15/06: Non-vertical pulling
- Y10T 117/1048: Pulling includes a horizontal component
- Y10T 117/1068: including heating or cooling details [e.g., shield configuration]
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

The lateral pulling growth of a thin and wide crystal ribbon is established by laterally pulling the crystal ribbon from the melt of a crystalline substance having the same crystal structure as that of the crystal ribbon with a gaseous cooling medium blown over the surfaces of the melt and the grown crystal.

## Claims

### Claim 1

A method of laterally growing a thin single crystal ribbon of a semiconductor substance from a melt surface of said substance which comprises the steps of
heating said melt in a crucible with a heating means,
contacting the undersurface of one end of a seed crystal to said melt surface,
melting back slightly said undersurface by adjusting heating thereof with said heating means,
cooling the uppersurface of a limited domain of said seed above said seed-melt contacting interface and defining a crystal growing domain on the surface of the melt in contact with said interface by blowing a gaseous cooling medium through at least one nozzle provided at the undesirside of a cooling apparatus located over said uppersurface,
laterally pulling said seed and successively grown crystal away from said melt surface over a peripheral edge of said crucible at a gradually-increasing rate, while changing said crystal growing domain from a short one to a long one by shifting the cooling apparatus in the direction opposite to the pulling direction,
increasing the blow rate of said gaseous cooling medium to maintain successive crystallization at a rate commensurate with an increasing pulling rate, and
controlling the area over which said gaseous cooling medium is blown as said crystal is grown to provide a crystal growing domain having a predetermined size and position, thereby growing said single crystal ribbon of semiconductor substance of controlled size under stabilized conditions at a high growth rate.

### Claim 2 (depends on 1)

The method of claim 1, in which said semiconductor substance is silicon and said gaseous cooling medium is selected from the group consisting of argon, helium, hydrogen and mixtures, thereof.

### Claim 3 (depends on 1)

The method of claim 1, wherein said semiconductor substance is silicon and said single crystal ribbon is pulled at a rate of at least 30 millimeters per minute.

### Claim 4 (depends on 1)

The method of claim 1, wherein the geometry of said crystal growing domain is changed by sliding in a suitable direction on the horizontal at least one baffle plate provided between the cooling means and the melt surface during operation.

### Claim 5 (depends on 1)

The method of claim 1, wherein the geometry of said crystal growing domain is changed by means of at least one movable heating means provided above and around said crystal growing domain during operation.

### Claim 6 (depends on 1)

The method of claim 1, wherein said semiconductor substance is silicon and said crystal ribbon is pulled at a rate of at least about 300 millimeters per minute.