Large crystal float zone apparatus
AssigneeTopsil A/S
InventorsNoel De Leon, Arno I. M. Larsen, Poul E. Knudsen, Erik H. Jensen
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Abstract
Apparatus for the float zone refining of large semiconductor crystals. Additional support in the form of lightweight pins is provided for the growing monocrystalline rod to hold the rod on the proper vertical axis. The pins protrude from the telescoping inner wall portion of the refining enclosure. This telescoping enclosure portion allows the pins to be in synchronous motion with the monocrystalline rod and also reduces the overall height of the apparatus.
Claims6
In an apparatus for the float zone refining of semiconductor materials which comprises a refining enclosure within which a rod of said semiconductor material is held and within which a molten zone traverses the length of said rod of semiconductor material and resolidifies forming a refined portion the improvement which comprises:
- a telescoping lower portion of said enclosure, and
- pins extensible from said lower portion and at an acute angle therewith for supporting the refined portion of said semiconductor rod.
The apparatus of claim 5 further comprising means for holding said telescoping portion initially vertically stationary.
Dependencies are inferred from the claim text.