Quick-acting electron-optical lenses
AssigneeDr. Ing. Rudolf Hell GmbH
InventorSiegfried Beisswenger
Life of this patent
Estimating the term…
Abstract
An electron-optical lens arrangement for electron beam apparatus having a static and a dynamic focussing lens system, in which the dynamic focussing lens system is situated inside the static focussing lens system.
Claims11
An electro-optical electromagnetic lens arrangement for controlling and altering the focus of an electron beam comprising an electromagnetic static focussing lens system, an electromagnetic dynamic focussing lens system situated within the static lens system, and a screen incorporated between the dynamic and static lens systems so that the flux generated by the static lens system does not traverse the dynamic lens system, and the flux generated by the dynamic lens system does not traverse the static lens system.
Dependencies are inferred from the claim text.