Solid state sensor
AssigneeEnergy for Independence, Inc.
InventorJohn D. Ryerson
Life of this patent
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Abstract
A solid state sensor that is ideally well suited for detecting the presence of ozone in an atmosphere under ambient conditions. A metal oxide semiconductor is placed upon a glass substrate by heating the substrate to about 1200.degree. F. and then depositing molten granules of the metal oxide upon the heated substrate whereby the granules become fused to the substrate and each other to form a rough textured coating. The oxide coating is machined to a desired thickness using any one of many suitable machining operations.
Claims19
The method of producing a solid state detector including the steps of
- maintaining a glass substrate at an elevated temperature at which the substrate is at least in a semi-molten state,
- heating granules of a semiconductor to a molten state, and
- depositing the molten granules upon the heated substrate whereby the granules fuse to the substrate and to each other in a randomly dispersed manner to provide a rough textured sensing coating thereon.
A detector for sensing the presence of ozone in an atmosphere including
- a quartz substrate
- granules of a lower valence oxide of a multi-valence metal oxide that is capable of sensing the presence of ozone in an atmosphere randomly fused to the quartz substrate and to each other to provide a rough textured sensing coating on said substrate, and
- a pair of electrical connections in contact with the coating to permit a current to be passed therethrough.
A solid state detector for sensing the presence of a gas in an atmosphere that is produced by maintaining a glass substrate at an elevated temperature in a semi-molten state, passing granules of a semiconductor through a flame front to melt the granules while they are in transit, and randomly depositing the molten particles upon the heated surface of the substrate to fuse the granules to the substrate and to each other thereby producing a rough-textured metal oxide coating that is securely bonded to the substrate.
Dependencies are inferred from the claim text.