Method for adjusting the focus and power of a trimming laser
AssigneeNational Semiconductor Corporation
InventorRichard H. Stone
Life of this patent
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Abstract
A laser is used to cut slots into a film deposited on a substrate so that a clean kerf is produced without harming the substrate. The laser cut vaporizes the film material as the removal mechanism and some of the vaporized material will redeposit over the surface of the film adjacent to the kerf. When the redeposited material is illuminated and viewed obliquely a series of light fringes can be observed. The laser focus is adjusted until the fringe pattern is symmetrical about the kerf. The laser power is adjusted until the fringes extend to about three times the kerf width on both sides of the kerf. This provides a precision nonsubjective means for adjusting laser focus and power.
Claims12
A process for trimming a deposited film on a substrate, using a laser to vaporize film material to produce a kerf therein, said process comprising the steps:
- applying a laser beam to said film to vaporize a portion thereof for controlling the characteristics of said film, whereby at least a portion of said vaporized material redeposits on the surface of said film in the vicinity of said kerf;
- illuminating said redeposited material;
- viewing said redeposited material at an angle so that said illumination produces light fringes;
- and
- adjusting said laser to produce a predetermined light fringe configuration.
A process for adjusting a laser to be used in the trimming of a film deposited on a substrate, wherein the beam generated by said laser is caused to traverse a portion of said film which is thereby removed by vaporization to leave a kerf in said film, said process comprising the steps:
- operating said laser to create a kerf in a deposited film in a test piece;
- illuminating said film in the vicinity of said kerf so as to illuminate any material vaporized from said kerf that has redeposited on the surface of said film;
- viewing the surface of said film in the vicinity of said kerf at an angle with respect to the plane of said surface so that said illumination produces visible light fringes in said redeposited film;
- adjusting said laser;
- and
- repeating the steps of operating, illuminating, viewing and adjusting until said light fringes assume a predetermined configuration.
Dependencies are inferred from the claim text.