Apparatus for wire bonding
AssigneeKulicke and Soffa Industries, Inc.
InventorsRichard J. Elles, Frederick W. Kulicke, Jr., Moshe E. Sade, Albert Soffa
Life of this patent
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Abstract
A wire bonding machine for wedge bonding fine wires to semiconductor devices is provided with a rotating bonding head which is mounted on a fixed machine frame and having a X-Y table mounted on the fixed machine frame opposite a vertically movable bonding tool mounted on the rotating bonding head. The bonding head is provided with means for articulating the bonding tool in a vertical direction and in a rotational direction. The rotational movement of the novel bonding head does not impart vertical movement to the bonding tool.
Claims24
Apparatus for fine wire bonding of the type having a rotatable bonding head, the combination comprising:
- a fixed machine frame,
- a theta drive motor mounted on said frame,
- a hollow cylindrical sleeve rotatably mounted on said frame for rotational movement by said theta drive motor,
- a bonding tool holder mounted on said hollow cylindrical sleeve for rotation by said theta drive motor,
- a bonding tool adapted to be mounted in said bonding tool holder,
- said bonding tool holder comprising means for mounting a bonding tool at the center of rotation of said hollow cylindrical sleeve,
- a Z-drive motor mounted on said frame for actuating vertical movement of said bonding tool, and
- means coupling said Z-drive motor to said bonding tool holder axially aligned with the center of rotation of said hollow cylindrical sleeve, whereby rotational movement of said hollow cylindrical sleeve does not impart vertical movement to said bonding tool.
Apparatus as set forth in claim 21 wherein said photo detector is sensitive to light in the light spectrum outside of the visible light range.
Apparatus for fine wire bonding comprising the combination;
- a fixed machine frame,
- a theta drive motor mounted on said frame,
- a hollow cylindrical sleeve rotatably mounted on said frame for rotational movement by said theta drive motor,
- a Z-slide mounted on said hollow cylindrical sleeve,
- a slider mounted for vertical movement on said Z-slide,
- a pivotable bonding tool holder mounted on said slider and rotatable with said hollow cylindrical sleeve,
- a bonding tool adapted to be mounted in said bonding tool holder,
- said bonding tool holder comprising means for mounting said bonding tool at the center of rotation of said hollow cylindrical sleeve,
- a Z-drive motor mounted on said frame for actuating vertical movement of a bonding tool, and
- means coupling said Z-drive motor to said slider axially aligned with the center of rotation of said hollow cylindrical sleeve, whereby rotational movement of said hollow cylindrical sleeve to position the working face of said bonding tool does not impart vertical motion to said bonding tool.
Dependencies are inferred from the claim text.