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US 4,236,832 AGranted
Strain insensitive integrated circuit resistor pair
AssigneeTokyo Shibaura Denki Kabushiki Kaisha
InventorsShigeru Komatsu, Satoshi Takahashi, Kouji Suzuki, Masao Wakatsuki
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Abstract
A semiconductor device includes first and second resistor regions having the same resistance and formed in a main surface of a silicon substrate to extend in a perpendicular direction. When the resistor regions have a p-conductivity type, said main surface is a {100} face, {511} face, {811} face or {911} face. When the resistor regions are of an n-conductivity type, said main surface is a {111} face.
Claims10
A semiconductor integrated circuit device comprising:
- a silicon semiconductor substrate of N-conductivity type having a least one main surface of a substantial (100), (511), (811), or (911) crystal face;
- a P-conductivity type resistor unit formed in said main surface, said resistor unit including (1) a first P-conductivity type resistor extending in a first direction in said main surface and having a first end and a second end, and (2) a second P-conductivity type resistor extending in a second direction in said main surface perpendicular to said first direction and having a first end solely connected to said second end of said first P-conductivity type resistor and a second end, said first and second P-conductivity type resistors having the same resistance;
- and
- a functional element formed in said main surface apart from said resistor unit and connected to said second end of said second P-conductivity type resistor.
1 more element
A semiconductor integrated circuit device comprising:
- a silicon semiconductor substrate of P-conductivity type having at least one main surface of a substantial (111) crystal face;
- a N-conductivity type resistor unit formed in said main surface, said resistor unit including (1) a first N-conductivity type resistor extending in a first direction in said main surface and having a first end and a second end, and (2) a second N-conductivity type resistor extending in a second direction in said main surface perpendicular to said first direction and having a first end solely connected to said second end of said first N-conductivity type resistor and a second end, said first and second N-conductivity type resistors having the same resistance;
- and
- a functional element formed in said main surface apart from said resistor unit and connected to said second end of said second N-conductivity type resistor.
1 more element
Dependencies are inferred from the claim text.