Vapor delivery system and method of maintaining a constant level of liquid therein
AssigneeWestern Electric Company, Inc.
InventorFred P. Partus
Life of this patent
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Abstract
A vapor delivery system is disclosed comprising a bubbler 12 is adapted to generate and deliver vapors from a vaporizable liquid contained therein, and a reservoir 30 in fluid communication with the bubbler 12 from which liquid may be continuously fed into the bubbler to replenish liquid vaporized within and withdrawn from the bubbler. The system further comprises means for sensing the level of vaporizable liquid in the bubbler and means for providing a gaseous head pressure in the reservoir of variable magnitude dependent upon the level of vaporizable liquid sensed by the sensing means to maintain the level of liquid in the bubbler substantially constant.
Claims10
A vapor delivery system comprising a reservoir;
- a bubbler adapted to generate and deliver vapors from a vaporizable liquid contained therein;
- conduit means providing bidirectional flow of liquid between said reservoir and bubbler;
- means for sensing the level of vaporizable liquid contained within said bubbler;
- and means for providing a gaseous head pressure in said reservoir of variable magnitudes dependent upon the level of vaporizable liquid sensed by said sensing means to maintain the level of liquid in the bubbler substantially constant.
A vapor delivery system comprising a reservoir;
- a bubbler adapted to generate and deliver vapors from a vaporizable liquid contained therein which includes means for introducing and bubbling a carrier gas upwardly through the contained liquid;
- conduit means for providing bilateral transfers of liquid between said reservoir and said bubbler;
- means for providing a gaseous head pressure within said reservoir;
- means for determining the level of vaporizable liquid contained within said bubbler;
- and means for altering the gaseous head pressure in said reservoir to maintain a selected level of vaporizable liquid within said bubbler substantially constant as liquid is vaporized and withdrawn from said bubbler and as the rates vary at which the carrier gas is introduced into the bubbler and bubbled upwardly through the liquid contained therein.
A method of maintaining a substantially constant level of liquid within a bubbler while vapors of the liquid are being withdrawn, and with the method comprising the steps of:
- (a) providing a reservoir of liquid in liquid communication with a body of liquid within the bubbler;
- (b) providing a gaseous head pressure within the reservoir;
- (c) sensing deviations of the actual level of liquid within the bubbler from a selected level;
- and
- (d) varying the gaseous head pressure within the reservoir responsive to sensed deviations of the actual liquid level within the bubbler from the selected level to maintain the actual level substantially at the selected level by alternately feeding liquid to or withdrawing liquid from the bubbler.
Dependencies are inferred from the claim text.