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US 4,234,367 AGranted
Method of making multilayered glass-ceramic structures having an internal distribution of copper-based conductors
AssigneeInternational Business Machines Corporation
InventorsLester W. Herron, Raj N. Master, Rao R. Tummala
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Abstract
The formation of sintered glass-ceramic substrates containing multi-level, interconnected thick-film circuit patterns of copper-based conductors obtained by firing in a controlled ambient of hydrogen and H.sub.2 O at temperatures below the melting point of copper.
Claims16
A method of forming a glass-ceramic composite structure with copper based metallurgy comprising:
- forming at least one green sheet comprised of a thermoplastic organic binder having dispersed therein particles of a crystallizable glass having a crystallization temperature below the melting point of copper;
- forming on a surface of a first said green sheet a pattern of a nonrefractory copper based conductor forming composition wherein the predominant component of said conductor is copper;
- superimposing a second said sheet on said surface of said first sheet to sandwich said pattern therebetween;
- laminating said superimposed sheets together;
- heating said laminate in an ambient of hydrogen and H.sub.2 O in a ratio of H.sub.2 /H.sub.2 O=about 10.sup.-4 to about 10.sup.-6.5 to a burn-out temperature in the range between the anneal and softening points of said glass and maintained thereat for sufficient time to decompose and eliminate said binder,
- substituting an inert atmosphere for said ambient;
- and
- heating said laminate to the crystallization temperature of said glass for coalescence of said glass particles and crystallization thereof into a glass-ceramic structure have a copper-based conductor pattern extending within the interior thereof.
5 more elements
Dependencies are inferred from the claim text.