Ion-electron analyzer
AssigneeHitachi, Ltd.
InventorsHifumi Tamura, Tohru Ishitani
Life of this patent
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Abstract
An ion-electron analyzer consists of an ion microprobe analyzer and an electron diffractometer which are accommodated in a single housing, an ion gun extracts an electron beam and a negative ion beam simultaneously from the same source of charged particles and simultaneously bombards these beams onto a selected location on the surface of a specimen.
Claims12
An ion-electron analyzer comprising means for producing a combined primary electron beam and negative primary ion beam from the same source of charged particles and for simultaneously bombarding a specimen in vacuum with said combined beam, means for forming an electron diffraction pattern utilizing electrons reflected by said specimen as a result of the bombardment of said specimen by said primary electron beam, and means for analyzing the masses of the secondary ions produced by said specimen as a result of the ion bombardment of said specimen by said negative primary ion beam.
An ion-electron analyzer comprising means for producing a combined primary electron beam and negative primary ion beam from the single charged particle source of duoplasmatron type, means for simultaneously bombarding a specimen with said combined beam, means for forming an electron diffraction pattern utilizing electrons reflected by said specimen as a result of the bombardment of said specimen by said primary electron beam, and means for analyzing the masses of the secondary ions produced by said specimen as a result of the ion bombardment of said specimen by said negative primary ion beam.
Dependencies are inferred from the claim text.