Passivating bath for semiconductive bodies
AssigneeSGS-ATES Componenti Elettronici S.p.A.
InventorsAntonio Gambardella, Marco Panigada
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Abstract
For applying a protective coating to a semiconductive body, such as a wafer or chip with exposed junctions, the body is immersed in a bath in which particles of a passivant such as glass are suspended for electrophoretic deposition on the body surface. The bath consists essentially of an organic solvent such as acetone, an amine and a hydrohalogenic acid in proportions yielding a preferably alkalinic pH between 4 and 10.
Claims7
In a process for protectively coating a semiconductive body by immersing same in a bath having particles of a vitreous or ceramic passivating material suspended therein and electrophoretically depositing said particles on the immersed body,
- the improvement wherein said bath consists essentially of an organic solvent, an amine, and a hydrohalogenic acid in proportions yielding a pH between substantially 4 and 10.
Dependencies are inferred from the claim text.