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AssigneeMotorola, Inc.
InventorsLawrence N. Dworsky, Jeffery A. Whalin, Warren P. Glotzbach
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A monolithic crystal filter formed by a multi-section piezoelectric resonator having anodizable electrodes is subjected to plasma from a low energy oxygen glow device to adjust the frequency response. The electrodes are selectively connected to potentials whereby the electrodes are individually anodized to increase the density thereof and change the frequency response of the resonator. The glow device includes anode and cathode rings separated by an insulator ring which holds a cathode screen across the cathode. The anode ring has a concave face and the inside diameter is generally the same as the diameter of the resonator so that the resonator can be placed close to the anode and plasma is localized on the resonator electrodes. The electrodes are connected in a frequency measuring circuit so that the response is monitored and the extent of anodization of the individual electrodes is controlled.
The method of adjusting the frequency response of a piezoelectric resonator device which includes a piezoelectric wafer with a plurality of resonating sections each having an anodizable electrode thereon, and with such electrodes of a plurality of sections being positioned adjacent to each other;
The method of adjusting the frequency response of a monolithic crystal filter which includes a quartz resonator plate with a plurality of aluminum electrodes on one side thereof;
Apparatus for adjusting the frequency response of a piezoelectric resonator device which includes a piezoelectric wafer with a plurality of resonating sections each having an anodizable electrode, and with such electrodes of a plurality of sections being positioned adjacent to each other, including in combination:
Dependencies are inferred from the claim text.