Piezoelectric crystalline film of zinc oxide and method for making same
AssigneeMurata Manufacturing Co., Ltd.
InventorsHiroshi Nishiyama, Toshio Ogawa, Tasuku Mashio
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Abstract
Piezoelectric crystalline film on a substrate, which is a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, the crystalline zinc oxide film containing, as an additive element, uranium. The piezoelectric crystalline films have high resistivity and a smooth surface, and make it possible to produce piezoelectric transducers with good conversion efficiency. Such films are made by sputtering zinc oxide and uranium onto a substrate from a film material source consisting essentially of a ceramic of zinc oxide containing uranium.
Claims7
A piezoelectric crystalline film disposed on a substrate, said film being a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of uranium.
Dependencies are inferred from the claim text.