Process for forming bonding pads on magnetic bubble devices
AssigneeIntel Magnetics, Inc.
InventorsPeter J. Silverman, Donald K. Rose
Life of this patent
Estimating the term…
Abstract
A process for thickening the relatively thin bonding pads of a single wall magnetic domain (bubble) device is disclosed. The process is particularly suited for thickening the pads defined by a buried metal layer, such as the conductive layer often disposed between the magnet garnet layer and permalloy layer. Windows are etched through a polyimide scratch protection layer to expose underlying bonding pads. A layer of gold is formed over this protective layer and over the exposed pads. The gold layer is washed away from the protective layer. Since the gold adheres only to the bonding pads, it remains to build up the thickness of these pads.
Claims10
In a magnetic bubble device which includes a layer of magnetic material in which magnetic bubbles are moved and a metal layer covered except for an exposed region by an overlying protective layer, a process for increasing the thickness of said exposed region comprising the steps of:
- forming a layer of gold over said protective layer and over said exposed region;
- washing said layer of gold from said protective layer but not from said exposed region;
- whereby the thickness of said exposed region is augmented by a layer of gold without an additional masking and etching step.
In a magnetic bubble device which includes a first layer of material in which magnetic bubbles are moved and a second layer disposed above said first layer, said second layer defining bonding pads, a process for preparing said device for probe testing or bonding comprising the steps of:
- forming a protective layer over said second layer;
- etching said protective layer to expose said bonding pads underlying said protective layer;
- forming a gold layer on said protective layer and on said bonding pads;
- washing said gold layer from said protective layer;
- whereby gold remains on said bonding pads, thereby thickening them before probe testing or bonding.
In a magnetic bubble device which includes a layer of material in which magnetic bubbles are moved, a first layer having first bonding pads covered by an insulative layer and a second layer disposed on said insulative layer having second bonding pads, a process for preparing said device for probe testing or bonding, comprising the steps of:
- forming a polyimide layer over said insulative layer, second layer and second bonding pads, thereby exposing said second bonding pads;
- etching said insulative layer in said region of said first bonding pads, thereby exposing said first bonding pads;
- forming a gold layer over said polyimide layer and said first and second bonding pads;
- washing away said gold layer from said polyimide layer;
- whereby said first and second bonding pads are thickened by said gold layer, thereby making them more suitable for probe testing or bonding.
Dependencies are inferred from the claim text.