Second order correction in linearized proximity probe
AssigneeADE Corporation
InventorsRobert C. Abbe, Noel S. Poduje, Daniel Klein
Life of this patent
Estimating the term…
Abstract
A system for reducing higher order nonlinearities in the linearized output of a dimension gauging probe in which the dimension gauging probe provides an output varying inversely with the physical dimension gauged which is in turn linearized to a signal varying proportionally with the physical dimension. Higher order nonlinearities, an error condition, which deviate the correspondence between the gauged dimension and the output from a linear or straight-line function, are reduced by feedback of the linearized output to the probe and, preferably, by feedforward of a portion of the probe output signal to the linearized signal.
Claims18
A system for providing higher order nonlinearity correction in the linearized output of a dimension gauge comprising:
- a probe sensitive to a physical dimension and providing an output signal varying inversely with said physical dimension;
- means responsive to said probe output for providing a linearized signal varying directly in magnitude with said physical dimension and having higher order nonlinearities in signal magnitude;
- and
- means for reducing said higher order nonlinearities in signal magnitude in said linearized signal.
A system for reducing higher order nonlinearities in a linearized output of a dimension gauging probe comprising:
- a dimension gauging probe having a probe output signal representative of a physical dimension and varying inversely therewith;
- signal combining means having a first input responsive to said probe output and providing an output signal representative of said probe output signal in combination with signals applied to other inputs thereof;
- ratio means having a numerator and a denominator input and providing an output representative of the ratio of the inputs applied to said numerator and to said denominator inputs and receiving on the numerator input an output representative of the output of said combining means and on the numerator input a reference signal;
- means for generating said reference signal;
- means for applying a signal representative of the output of said ratio means as a second input of said combining means.
A system for providing higher order nonlinearity correction in a linearized signal representative of a value comprising:
- means for providing an output signal varying inversely with respect to said value;
- means responsive to said output signal for providing a linearized signal varying in magnitude directly with said value and having higher order nonlinearities in signal magnitude;
- and
- means for reducing said higher order nonlinearities in signal magnitude in said linearized signal.
Dependencies are inferred from the claim text.