Wafer loading apparatus for beam treatment
AssigneeNova Associates, Inc.
InventorGeoffrey Ryding
Life of this patent
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Abstract
Ion implantation equipment of the spinning disk type has an automated disk exchange system employing a pair of arms that interchange disks between a pair of exchange stations. One exchange station is defined by a back cover of a target chamber that hinges down. The disk drive motor is mounted on that cover and introduces water cooling for the disk through the drive shaft. Heat conductive elastomeric material interposed between the disk and its support on the shaft ensures good heat transfer from the disk in a high vacuum environment. The exchange system employs linear and rotary actuators of the fluid cylinder type, and the pickup head employs a pneumatic robot that operates a toggle clamp that secures the disk for its scanning rotation.
Claims20
Apparatus for exchanging a treated disk for an untreated disk in ion implantation equipment, said implantation equipment being of the type comprising a vacuum chamber in which said disks are subjected to an ion beam and a rotating spindle to which said disks are attached for rotation with respect to said beam, said exchange apparatus comprising:
- means for moving said treated disk from said vacuum chamber to a first exchange position,
- means for supporting said untreated disk at a second exchange position adjacent said first position,
- means for locking said disks to said spindle,
- means for engaging and disengaging said locking means, and
- means for simultaneously moving said treated disk from said first to said second position and said untreated disk from said second position to said first position.
A compact spinning-disk type of ion implanter having evacuated wafer chamber which slides back and forth on a sliding seal, the back cover of said chamber carrying on its outside a rotary drive for the spinning disk, and the cover being mounted to hinge away from the chamber to expose the disk for interchange.
Dependencies are inferred from the claim text.