Method of slicing a wafer
AssigneeRCA Corporation
InventorRobert R. Demers
Life of this patent
Estimating the term…
Abstract
The quality of the as-sawn surfaces of a wafer is improved by preventing the saw blade from striking the wafer surfaces during the blade return stroke by leaning the just-sawn wafer away from the blade and by slightly retracting the face of the ingot from the plane of the saw blade. A fluid-jet-induced deformation of the binding compound portion of the ingot is preferred as a means of leaning the wafer away from the saw blade. Using this technique a number of wafers may be successively sawn from an ingot and kept attached to the ingot by the binding compound without the surfaces of the wafers being scored during the return strokes of the blade.
Claims3
A method of slicing wafers from an ingot which comprises a boule of the material to be sliced into wafers and a binding material for retaining the wafers as part of said ingot after they have been sliced, wherein said method comprises slicing a plurality of wafers from said boule prior to severing any of said plurality of wafers from said ingot, said method comprising:
- (a) slicing a wafer from said boule with the blade of a wafer saw, without severing said wafer from said ingot;
- (b) applying a force to said wafer to lean said wafer a sufficient distance away from said blade to prevent said blade from contacting said wafer during the return stroke of said blade, all without severing said wafer from said ingot;
- (c) returning said blade to its initial position clear of said ingot while said wafer is leaned away from said blade;
- (d) repeating steps a, b and c until said plurality of wafers has been sliced;
- and
- (e) severing said plurality of wafers from said ingot after completing step (d).
Dependencies are inferred from the claim text.