Lateral pulling growth of crystal ribbons and apparatus therefor
AssigneesMitsubishi Kinzoku Kabushiki Kaisha, Japan Silicon Co., Ltd.
InventorsTaro Shudo, Bosshi Kudo, Yasushi Tamai
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Abstract
The lateral pulling growth of a thin and wide crystal ribbon is established by laterally pulling the crystal ribbon from the melt of a crystalline substance having the same crystal structure as that of the crystal ribbon with a gaseous cooling medium blown over the surfaces of the melt and the grown crystal.
Claims3
Apparatus for growing a thin single crystal ribbon at high speed by continuously substantially laterally pulling a crystal ribbon of a substance from a melt surface of said substance, a crystal growing interface being formed between said pulled crystal ribbon and the surface of the melt in contact therewith, comprising:
- means for containing said substance;
- means for heating and melting said substance and producing said melt surface on the upper surface of said substance;
- gas cooling means provided with at least one nozzle for blowing a gaseous cooling medium over at least a portion of the upper surface of the melt and over the upper surface of at least a portion of the crystal ribbon above said interface, and defining a crystal growing domain on the surface of the melt in contact with said interface, said cooling means controlling the temperature of the melt surrounding said crystal growing domain to above the melting point thereof so that crystal growth occurs on the surface of said crystal ribbon at said interface, said cooling means being provided above said crystal growing domain and in the vicinity thereof;
- said cooling means being movable in a horizontal direction back and forth substantially in the pulling direction of said crystal ribbon to change the geometry in the horizontal direction of said crystal growing domain during pulling of said crystal ribbon, said cooling means being movable in a direction opposite to the crystal ribbon pulling direction to change a short crystal growing interface to a longer crystal growing interface during pulling of said crystal ribbon.
Dependencies are inferred from the claim text.