Wafer loading and positioning device
AssigneeThomson-CSF
InventorsRene Gerard, Michel Lacombat
Life of this patent
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Abstract
The present invention relates to the precise positioning of a body exhibiting a flat face, said latter requiring to be aligned, or in other words brought into coincidence with a mechanically indexed reference plane. The loading device in accordance with the invention comprises a levelling stage associated with a loading flap which can pivot about an axis. The stage comprises a base containing a cylindrical bore, and a lockable supporting stand equipped with a spherical-walled sleeve located in said cylindrical bore. The flap and the stage are equipped with mechanical indexing means which cooperate with those defining the reference plane.
Claims15
A loading device for positioning a body having a flat face in a position such that said flat face coincides with a mechanically indexed reference plane, said device comprising:
- a mounting frame carrying mechanical indexing means defining said reference plane, a levelling stage for supporting said body, and fitting means for setting down said flat face in said position;
- said levelling stage comprising a base member, and a flat topped supporting member;
- said base member being provided with a cylindrical bore, and said supporting member having a spherical bearing surface slidably mounted within said cylindrical bore, said supporting member and said base member being clampable in fixed relation to each other;
- said levelling stage further comprising repulsion means for pushing said supporting member away from the bottom of said base member, and straining means, acting on one of said members for controlling the amount of clamping thereof.
Dependencies are inferred from the claim text.