Method of preparing polyamide acid type intermediates for processing of semiconductors
AssigneeHitachi Chemical Company, Ltd.
InventorsDaisuke Makino, Yasuo Miyadera, Seiki Harada, Atsushi Saiki
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Abstract
A method of preparing a polyamide acid type intermediate is provided, by using a purified inert solvent and monomer compounds, or diamine and/or diaminoamide compounds and a tetracarboxylic acid dianhydride, whose ionic impurities and free acid contents were reduced by recrystallization purification. The polyamide acid type intermediate may improve electrical properties and heat resistance of semiconductors when it is applied to, for instance, a surface-protecting film of semiconductors or an interlayer-insulating film of semiconductors having a multiple layer wiring structure.
Claims2
A method of preparing a polyamide acid type intermediate for processing of semiconductors by reacting at least one compound selected from the group consisting of diamine and diaminoamide compounds, and a tetracarboxylic acid dianhydride, as monomer compounds, the improvement comprises using (A) an inert solvent purified by distillation or ion-exchange, and (B) said monomer compounds having been purified to have reduced contents of ionic impurities and free acid by recrystallization comprising dissolving each monomer being purified in a solvent which is heated, then filtering and cooling the filtrate to precipitate purified monomer.
Dependencies are inferred from the claim text.