X-ray resist containing poly(2,3-dichloro-1-propyl acrylate) and poly(glycidyl methacrylate-co-ethyl acrylate)
AssigneeBell Telephone Laboratories, Incorporated
InventorsJoseph M. Moran, Gary N. Taylor
Life of this patent
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Abstract
A mixture of poly(2,3-dichloro-1-propyl acrylate) and poly(glycidyl methacrylate-co-ethyl acrylate), with the latter forming between 1 percent and 20 percent by weight, of the total polymer mixture, has been found to form an x-ray resist having adhesive and resolving properties superior to those of poly(2,3-dichloro-1-propyl acrylate) which is a good x-ray resist material. Superior properties of the mixture are attributed to the fact that the two polymers form a compatible polymer mixture which is a relatively rare and unpredictable event in polymer chemistry.
Claims26
Article comprising a substrate coated with an x-ray curable material having a thickness of at least 0.5 microns and is CHARACTERIZED IN THAT said x-ray curable material consists essentially of a mixture of a first polymer, said first polymer being poly(2,3-dichloro-1-propyl acrylate), said poly(2,3-dichloro-1-propyl acrylate) having a weight average molecular weight between 300,000 and 3,500,000, and a second polymer, said second polymer being poly(glycidyl methacrylate-co-ethyl acrylate), said poly(glycidyl methacrylate-co-ethyl acrylate) constituting between 1 percent and 20 percent, by weight, of said mixture.
Process for pattern delineating a substrate coated with a negative resist material having a thickness of at least 0.5 microns comprising the steps of
- exposing selected portions of said resist material to radiation which causes said exposed portions to become less easily removable with respect to the unexposed portions, in which said resist consists essentially of a polymer;
- removing the unexposed portions;
- and
- processing the pattern delineated resist and substrate with processing steps that alter the bared substrate areas CHARACTERIZED IN THAT said resist material consists essentially of a mixture of a first polymer, said first polymer being poly(2,3-dichloro-1-propyl acrylate), said poly(2,3-dichloro-1-propyl acrylate) having a weight average molecular weight between 300,000 and 3,500,000, and a second polymer, said second polymer being poly(glycidyl methacrylate-co-ethyl acrylate), said poly(glycidyl methacrylate-co-ethyl acrylate) constituting between 1 percent and 20 percent by weight, of said mixture.
Dependencies are inferred from the claim text.