Back to results
US 4,224,725 AGranted
Method for manufacturing an acoustic surface wave interaction device
AssigneeMurata Manufacturing Co., Ltd.
InventorsMichio Kadota, Tomoharu Sato, Kenji Suzuki
Life of this patent
Estimating the term…
Abstract
A method for manufacturing an acoustic surface wave interaction device includes the steps of forming an interdigitated electrode array on one flat surface of a piezoelectric plate, covering the interdigital electrode with a thin layer of dielectric material, and applying a predetermined DC voltage across the thickness of the piezoelectric plate for polarization.
Claims6
A method for manufacturing an acoustic surface wave interaction device comprising the steps of:
- (a) preparing a piezoelectric plate having first and second flat major surfaces;
- (b) forming a plurality of interdigitated electrodes having a predetermined pattern on said first flat surface of said piezoelectric plate, each of said interdigitated electrodes having a plurality of fingers which are interleaved and a terminal member connected to said fingers;
- (c) applying a thin layer of dielectric material to said first flat surface such that said thin layer of dielectric material entirely covers said fingers of said interdigitated electrodes but leaves at least one portion of each of said terminal members uncovered;
- (d) applying a first layer of conductive material on said second flat surface of said piezoelectric plate;
- and
- (e) applying a predetermined DC voltage across the thickness of said piezoelectric plate, between said first flat surface of said piezoelectric plate and said first layer of conductive material, for polarizing said piezoelectric plate in the direction of its thickness.
3 more elements
A method for manufacturing an acoustic surface wave interaction device comprising the steps of:
- (a) preparing a piezoelectric plate having first and second flat major surfaces;
- (b) applying a first layer of conductive material to said first flat surface of said piezoelectric plate;
- (c) forming an array of interdigitated electrodes having a predetermined pattern on said second flat surface of said piezoelectric plate, each of said interdigitated electrodes having a plurality of fingers which are interleaved and a terminal member connected to said fingers;
- (d) applying a thin layer of dielectric material to said second flat surface of said piezoelectric plate, such that said thin layer of dielectric material entirely covers said fingers of said interdigitated electrodes but leaves at least one portion of each said terminal member uncovered;
- and
- (e) applying a predetermined DC voltage across the thickness of said piezoelectric plate, between said respective uncovered portions of said terminal members and said first layer of conductive material, for polarizing said piezoelectric plate in the direction of its thickness.
3 more elements
A method for manufacturing an acoustic surface wave interaction device comprising the steps of:
- (a) preparing piezoelectric plate having first and second flat major surfaces;
- (b) forming an array of interdigitated electrodes having a predetermined pattern on one flat surface of the piezoelectric plate, said interdigitated electrodes each having a plurality of fingers which are interleaving and a terminal member connected to said fingers;
- (c) applying a first layer of conductive material to said second flat surface of said piezoelectric plate;
- (d) applying a thin layer of dielectric material to said first flat surface of said piezoelectric plate, such that said thin layer of dielectric material entirely covers said fingers of said interdigitated electrodes but leaves at least one portion of each said terminal member uncovered;
- and
- (e) applying a predetermined DC voltage across the thickness of said piezoelectric plate, between said respective uncovered portions of said terminal members and said first layer of conductive material, for polarizing said piezoelectric plate in the direction of its thickness.
3 more elements
Dependencies are inferred from the claim text.