Adaptive servo control system
OwnerDonald K. Millerinventor
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OwnerDonald K. Millerinventor
Estimating the term…
An adaptive position control system including X, Y and .theta. stages and their associated positioning and motion detection apparatus, position detection apparatus for detecting the position of the stages relative to a fixed reference, X and Y position control subsystems responsive to signals developed by the motion and position detection apparatus and operative to generate coarse mode and precision mode drive signals for application to the X and Y stage positioning apparatus, X and Y adjust subsystems for enabling adjustment of the position detection apparatus, and a .theta. adjust subsystem operative in a coarse mode and precision mode for adjusting of the angular orientation of the .theta. stage. Operator control input to the various subsystems is accomplished by means of a joystick control mechanism and central processing unit.
An adaptive servo control system comprising:
An adaptive servo control system comprising:
Dependencies are inferred from the claim text.