Tube with bonded cathode and electrode structure and getter
AssigneeThe United States of America as represented by the Secretary of the Army
InventorsDavid W. Oliver, Norman T. Lavoo
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AssigneeThe United States of America as represented by the Secretary of the Army
InventorsDavid W. Oliver, Norman T. Lavoo
Estimating the term…
The variety of technologies that have been applied in the development of a onded grid cathode are described. These include chemical vapor deposition of tungsten, molybdenum, iridium BN, and Si.sub.3 N.sub.4 on both sides of a sintered tungsten cathode disk. Zirconium and titanium getters have been used to eliminate nitrogen evolution problems. The getter plates are also used as heat shields for the bonded heater. Films of Si.sub.3 N.sub.4 have been added to the insulation to prevent calcium and barium diffusion into the layer and maintain adequate resistivity and breakdown strength. Plasma etching was introduced as a method of removing Si.sub.3 N.sub.4 from the cathode pores. A new method, erosion lithography, is used for making the fine-detail grid structure, combining air erosion and lithographic techniques.
Apparatus in an electron discharge device having a unitary heater, cathode, and control grid structure which comprises cathode formed from a circular disk of porous refractory metal having two spaced parallel outer surfaces and a peripheral edge, an inorganic insulating layer including boron nitride covering the surfaces of said disk except for a strip around part of the peripheral edge, and a film of refractory metal overlying substantially all of said insulating layer, the film on one surface having a gridlike configuration, the film on the other surface having a configuration of a heating element, said disk containing thermionic emissive material, and the insulating layer on said one surface having openings extending into the porous disk corresponding to the openings in the gridlike configuration of said film, whereby when the heating element is heated, electrons are directed through said openings in the insulating layer and the film on said one surface,
Dependencies are inferred from the claim text.