Vapor delivery system and method

A system for delivering a vapor blend to a vapor deposition site substantially uncontaminated with vapor condensate which system comprises a plurality of bubblers each having means for containing and heating liquids to form vapors;

• means for introducing a carrier gas into each of said bubblers;
• a temperature controlled chamber located adjacent said plurality of bubblers compartmentalized into a plurality of spaces;
• means for heating the compartmentalized spaces within said temperature controlled chamber and for maintaining said spaces at mutually diverse temperatures;
• a manifold mounted within the warmer of said two spaces;
• means for providing fluid communication between said manifold and the vapor deposition site;
• and a conduit extending from each of said bubblers into said temperature controlled chamber wherein the said conduits are coupled with said manifold thereby providing fluid communication between the bubbler and the vapor deposition site and through the cooler of said two spaces between said bubblers and said manifold to inhibit the formation of condensates.