Ohmic contact of N-GaAs to electrical conductive substrates by controlled growth of N-GaAs polycrystalline layers
AssigneeBell Telephone Laboratories, Incorporated
InventorWilbur D. Johnston, Jr.
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Abstract
Thin layers of polycrystalline n-type GaAs have been deposited on a conducting substrate such as graphite. These contacted GaAs layers exhibit desirable properties for device applications, i.e., adequate cohesion between the GaAs and the substrate, good electrical contact to the conducting substrate, and good nucleation of the GaAs on the substrate yielding pinhole free or near pinhole free GaAs layers composed of large grains. These properties are obtained by first depositing a very thin coating, a coating with a nominal thickness between 1000 A and 250 A, of a Group IV element, Ge, Si, or Sn, onto the conducting substrate and then depositing the GaAs over this thin layer.
Claims17
A supported semiconductor layer comprising an n-type layer of GaAs deposited on and forming an interface with an electrically conductive body characterized in that said layer of GaAs is a polycrystalline layer and said electrically conductive body comprises an electrically conductive substrate having deposited thereon an elemental layer of nominal thickness in the range of 1000 to 250 A, wherein said elemental layer is substantially only one element of the group consisting essentially of Ge, Sn, and Si and wherein the resistance of said interface is less than 2 ohm-cm.sup.2, the blocking voltage is less than 0.05 V and said n-type layer of GaAs covers at least 90% of said electrically conductive body.
a supported semiconductor layer comprising a conducting substrate having deposited thereon in succession (1) a 250 to 1000 A thick metal layer substantially comprising only one element of the group consisting essentially of Ge, Sn, and Si, and (2) a polycrystalline layer of n-type GaAs, wherein the resistance at the interface between said metal layer and said polycrystalline layer is less than 2 ohm-cm.sup.2, the blocking voltage is less than 0.05 V, and said polycrystalline layer covers at least 90% of said conducting substrate.
Dependencies are inferred from the claim text.