Transmission-type scanning charged-particle beam microscope
AssigneeSiemens Aktiengesellschaft
InventorsKarl-Heinz Muller, Burkhard Krisch, Volker Rindfleisch, Hans F. R. Neuendorff
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Abstract
An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.
Claims9
In a transmission-type, scanning, charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined, said beam comprising a primary ray cone and a scatter-ray cone which generate a bright-field image and a dark-field image of said specimen, respectively, said microscope further comprising means for detecting a bright-field image of said specimen generated by said beam, the improvement comprising,
- a transparent fluorescent screen disposed behind said specimen along the beam path in said microscope;
- means adapted to prevent said primary ray cone from striking said screen;
- light-optical means adapted for imaging said fluorescent screen on a target of said television camera tube and thereby detecting a diffraction image of said specimen generated by said beam;
- and
- detector means disposed adjacent said fluorescent screen for detecting radiation emitted by said fluorescent screen when said scatter-ray cone of said beam strikes said screen and thereby a dark-field image of said specimen generated by said beam.
Dependencies are inferred from the claim text.