Monocrystalline like layers, processes of manufacturing such layers, and articles comprising such layers
AssigneeAgence Nationale de Valorisation de la Recherche (ANVAR)
InventorArmand Hadni
Life of this patent
Estimating the term…
Abstract
Thin monocrystalline like layers and articles comprising such layers as well as methods of making the layers and articles are disclosed. The layer have a thickness on the order of a micron and have a surface area on the order of 1 cm.sup.2. The layers are made out of a given material and are grown on a layer made of a material different from the given material which rests on a crystal mass made of either the same material or of a material having the same or a related structure as the crystal to be grown.
Claims12
Article comprising:
- a first layer in contact with a face of a monocrystalline support, said first layer being made out of a second material which is different from the material constituting the support, said first layer comprising openings of small cross-section;
- a second layer made out of a third material different from the support material and from the second material, said second layer being in contact with said first layer and with the parts of the monocrystalline support aligned with the openings in the said first layer, said second layer being of small thickness controlled within limits and having openings of small cross-section therein because of its thickness;
- and
- a thin monocrystalline-like layer being disposed on said second layer, said thin monocrystalline-like layer being made out of a given material which is the same as or has a structure which is the same as or related to that of the support material.
Process of growing a thin monocrystalline-like layer of a given material which comprises:
- depositing an intermediary layer having two superposed parts on a monocrystalline support made out of the said given material or out of a material having same or a related structure, said parts of this intermediary layer being made out of different materials which differ from the given material, the first of these parts being directly in contact with the support and having openings of small cross-section distributed over its surface, and the second part covering the first part and having a small thickness controlled within limits and presenting, because of its thickness, submicroscopic openings at least in front of the openings of the first part, and
- growing said thin monocrystalline-like layer on said intermediary layer.
Dependencies are inferred from the claim text.