Process for determining the effective doping agent content of hydrogen for the production of semiconductors
AssigneeWacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
InventorsDietrich Schmidt, Johann Hofer, Heinz Herzer
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Abstract
A process for determining the effective doping agent content of hydrogen the production of semiconductors which comprises zone drawing a silicon rod of highest purity and having a known specific resistance, in the presence of hydrogen to be tested, subsequently redetermining the specific resistance of the silicon rod, and computing the concentration of the doping agent in the hydrogen used from the known relationship between the specific resistance and the amount of doping agent. By stepwise determination of the resistance along the longitudinal axis of the rod, the amount of doping agent built into the rod at different levels can thus be determined.
Claims1
A process for determining the purity of hydrogen used in the production of semiconductors, relative to the effective doping agent content thereof, comprising the steps of:
- zone drawing a silicon rod of highest purity and known specific resistance in a quartz tube havng a slightly larger internal diameter than the diameter of the silicon rod by means of an induction coil surrounding said quartz tube, moving at a speed of 0.01 to 1 cm/min., solely in the presence of the hydrogen to be tested by passing a definite amount of said hydrogen around said rod during the zone-drawing thereof and thereby doping said silicon rod with the doping agents which may be present in said hydrogen;
- and
- determining the effective doping agent content of said hydrogen and, in turn, the purity thereof, by measuring the specific resistance of the silicon rod after zone-drawing.
Dependencies are inferred from the claim text.