Multiple electron lens
AssigneeKabushiki Kaisha Akashi Seisakusho
InventorsShogo Shirai, Akira Onoguchi
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Abstract
A multiple electron lens having two axially spaced polepieces defining a space therebetween. The polepieces each have a plurality of axial through openings aligned coaxially defining electron beam paths. A sole anode plate is disposed axially spaced from the polepieces and has openings aligned with the openings defining the beam paths and equal in number thereto. Each beam path has an auxiliary exciting coil and a corresponding stigmator coaxially arranged with the related beam path within the space defined between the polepieces.
Claims2
A multiple electron lens comprising a cylindrical yoke, a main exciting coil in said yoke, a multiple electron lens in said main coil having two axially spaced polepieces defining a space therebetween, each polepiece having axial through openings and said polepieces positioned with respective pairs of through openings through said axially spaced polepieces aligned axially and each aligned pair of through openings defining an electron beam path, a sole anode disposed coaxially with the polepieces spaced axially therefrom and having openings corresponding in number to the openings in the polepieces and aligned therewith, for each beam path an auxiliary exciting coil in said space coaxial with a corresponding beam path, for each beam path a stigmator coaxial with a corresponding auxiliary coil and adjacent thereto.
A multiple electron lens comprising two axially spaced polepieces each having a plurality of axial through openings with corresponding through openings of said two polepieces aligned coaxially for defining a plurality of electron beam paths each through a respective pair of aligned through openings, the spaced polepieces defining a space therebetween, a sole anode disposed coaxially with the polepieces spaced axially therefrom and having openings corresponding in number to the openings in the polepieces and aligned therewith, for each beam path an auxiliary exciting coil in said space coaxial with a corresponding beam path, for each beam path a stigmator coaxial with a corresponding auxiliary coil and adjacent thereto.
Dependencies are inferred from the claim text.