Periodic monolayer semiconductor structures grown by molecular beam epitaxy
AssigneeBell Telephone Laboratories, Incorporated
InventorsRaymond Dingle, Arthur C. Gossard, Pierre M. Petroff, William Wiegmann
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AssigneeBell Telephone Laboratories, Incorporated
InventorsRaymond Dingle, Arthur C. Gossard, Pierre M. Petroff, William Wiegmann
Estimating the term…
Suitably modified molecular beam epitaxy (MBE) techniques are used to synthesize single crystal, periodic monolayer superlattices of semiconductor alloys on single crystal substrates maintained below a critical growth temperature. Described is the fabrication of periodic structures of (GaAs).sub.n (AlAs).sub.m, where m and n are the number of contiguous monolayers of GaAs and AlAs, respectively, in each period of the structure. As many as 10,000 monolayers were grown in a single structure. Also described is the MBE growth of (Al.sub.x Ga.sub.1-x As).sub.n (Ge.sub.2).sub.m, quasi-superlattice and non-superlattice structures depending on the particular values of n, m and the growth temperature. Waveguides, heterostructure lasers and X-ray reflectors using some of the structures are also described.
A periodic semiconductor structure comprising in each period:
In a double heterostructure, a semiconductor body comprising:
The body of claim 22 wherein said active region is adapted to emit radiation at a wavelength of about 1.0-1.1 .mu.m.
The body of claim 22 wherein said cladding regions are fabricated from an Al.sub.y Ga.sub.1-y As random alloy, 0.ltoreq.y.ltoreq.1,y>x.
In a double heterostructure, a semiconductor body comprising:
Dependencies are inferred from the claim text.