Auger electron spectroscopy
AssigneeThe Perkin-Elmer Corporation
InventorRobert Gerlach
Life of this patent
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Abstract
An instrument utilizing the Auger effect and including a cylindrical mirror analyzer with magnetic lenses and an off-axis annular-aperture collector apparatus arranged in a unique configuration.
Claims38
In an apparatus for electron spectroscopy, the improvement comprising:
- magnetic lens means for condensing and focusing electrons onto a test sample;
- means defining a housing disposed about the axis of the instrument and adapted for receiving electrons emitted by the sample;
- means defining an off-axis annular gap of adjustable width associated with the housing means in a concentric relationship therewith and with the instrument axis, the means being adapted for admitting emitted electrons through the gap into the housing, and
- electron detector means positioned within the housing proximate the gap for detecting electrons admitted through the gap.
Apparatus comprising:
- means for receiving charged particles, the means defining a housing disposed about an axis;
- means for admitting charged particles into the housing, the means defining an annular gap of adjustable width in the housing concentric with the axis thereof;
- means within the housing proximate the gap for detecting charged particles admitted through the gap, and
- wherein the housing has an open end and the means defining the annular gap comprises an end covering means disposed at the open end and actuating means for moving the housing and the end covering means relative to each other for varying the size of the annular gap.
Apparatus comprising:
- means for receiving charged particles, the means defining a housing disposed about an axis;
- means for admitting charged particles into the housing, the means defining an annular gap of adjustable width in the housing concentric with the axis thereof;
- means within the housing proximate the gap for detecting charged particles admitted through the gap, and
- wherein the housing has an open end, and the means defining the annular gap comprises an end cap disposed at the open end normal to the axis, and actuating means for moving the end cap toward and away from the open end is included in the apparatus.
Apparatus comprising:
- means for receiving charged particles, the means defining a housing disposed about an axis;
- means for admitting charged particles into the housing, the means defining an annular gap of adjustable width in the housing concentric with the axis thereof;
- means within the housing proximate the gap for detecting charged particles admitted through the gap, and
- the apparatus further including a coaxial cylindrical-type analyzer comprising an inner cylinder and an outer cylinder and means defining a path for charged particles through the cylinders and at least that portion of the charged particle receiving housing having the annular gap disposed coaxially within the end portion of the inner cylinder substantially at the end of the charged particle path defined thereby.
An instrument for analyzing the energy of electrons emitted from a test sample, the instrument including a plurality of elements disposed along a common axis and comprising:
- source means disposed at one end of the instrument for providing an irradiating beam of electrons along the axis;
- an objective lens means disposed at the other end of the instrument for focusing the beam of irradiating electrons onto a test sample to cause the emission of electrons therefrom to be analyzed;
- electron detecting means disposed between the source means and the objective lens means for detecting electrons emitted from the test sample, the detecting means defining an axial path therethrough for passage of the beam of irradiating electrons from the source means to the objective lens means and further defining an off-axis annular gap of adjustable width concentric with the axis for admitting the emitted electrons to the detecting means, and
- means defining a path from the test sample around the objective lens to the detecting means for the emitted electrons.
An instrument for analyzing the energy of charged particles emitted from a test sample, the instrument including a plurality of elements disposed along a common axis and comprising:
- source means disposed at one end of the instrument for providing an irradiating beam of charged particles along the axis;
- a charged particle objective lens means disposed at the other end of the instrument for focusing the beam of irradiating charged particles onto a test sample to cause the emission of charged particles therefrom to be analyzed;
- charged particle detecting means disposed between the source means and the objective lens means including an off-axis annular gap of adjustable width for detecting charged particles emitted from the test sample, the detecting means defining an axial path therethrough for passage of the beam of irradiating charged particles from the source means to the objective lens means, and
- means defining a path from the test sample to the detecting means for the emitted charged particles.
In a spectroscopic instrument of the electron charged particle type including a cylindrical mirror analyzer, the improvement comprising in combination a coaxial electron detector means and coaxial magnetic objective lens means, both of which are concentrically disposed about the axis of the instrument and operatively positioned relative to the cylindrical mirror analyzer substantially at opposite ends thereof, the detector means including off-axis electron collector means having an annular, off-axis electron aperture of adjustable width.
In a spectroscopic instrument of the electron charged particle type including an electron energy analyzer means, the improvement comprising in combination a coaxial electron detector means and coaxial magnetic objective lens means, both of which are concentrically disposed about the axis of the instrument and operatively positioned relative to the analyzer means substantially at opposite ends thereof, the detector means including off-axis electron collector means having an annular, off-axis electron aperture of adjustable width.
Dependencies are inferred from the claim text.