Apparatus for controlling the directional solidification of a liquid-solid system
AssigneeCommissariat a l'Energie Atomique
InventorsPierre Dusserre, Claude Potard
Life of this patent
Estimating the term…
Abstract
The growth of a solid obtained by cooling a liquid solution is observed and controlled by measuring the variation in volume of the solid-liquid system at the time of solidification. The method is applicable to the control of oriented crystallization from an initial crystal seed or epitaxial growth on a substrate having a suitable crystal orientation. The rate of crystallization can be controlled by means of a furnace provided with means for producing regulated thermal gradients, temperature-measuring means, a chamber filled with an inert liquid, an open-topped container filled with the liquid to be solidified and immersed in the inert liquid, the container being suspended from one arm of the beam of an electrobalance.
Claims10
Apparatus for controlling the directional solidification of a two-phase liquid-solid system wherein the solidification is by cooling of and occurs in the liquid phase, said apparatus comprising:
- a container for holding the liquid-solid system;
- heating means for producing a thermal gradient of regulated value within said container;
- means for measuring variations in the volume of the liquid-solid system resulting from changes in molar volume due to transfer between liquid and solid phases in the system during the solidification;
- and
- means for regulating said thermal gradient responsive to said measured variations in the volume of the liquid-solid system.
Apparatus for controlling the directional solidification of a two-phase liquid-solid system wherein solidification is by cooling of and occurs in the liquid phase, said apparatus comprising:
- a first open container for holding an inert liquid;
- heating means for producing a thermal gradient of regulated value within said first container;
- a second open container containing the liquid to be solidified, said second container being immersed in the inert liquid of said first container, the inert liquid and the upper surface of the liquid to be solidified being in contact;
- means for measuring variations in the apparent weight of said second container and its contents, said variations in apparent weight being due to changes in buoyancy of the second container and its contents resulting from changes in the volume of its contents which occur during mass transfer from the liquid phase to the solid phase during solidification;
- and
- means for regulating said thermal gradient responsive to said measured variations in apparent weight.
Apparatus for controlling the epitaxial growth of a solid, from liquid phase, on a crystalline substrate, said apparatus comprising:
- an elongated housing;
- a pair of elements slidably mounted within said housing and defining a space therebetween for containing the liquid;
- at least one recess in said housing for holding the crystalline substrate for contact with the liquid;
- a capillary tube mounted on said housing, the lower end of said capillary tube opening into the interior of said housing for communication with said liquid containing space;
- means for measuring variations in the level of the liquid meniscus in said capillary resulting from charges in volume of the contents of space which occur during mass transfer from the liquid phase to the solid phase during solidification on the substrate;
- and
- heating means for controlling the temperature within said housing responsive to said measured variations in meniscus level.
Apparatus for controlling the directional solidification of a two-phase liquid-solid system wherein solidification is by cooling of and occurs in the liquid phase, said apparatus comprising:
- an open container for holding the liquid undergoing solidification;
- a plunger having a density greater than that of the liquid and means for suspending the plunger in a stationary position partially immersed in the liquid:
- means for measuring variations in the apparent weight of siad plunger due to changes in the bouyant force of the liquid on the stationarily positioned plunger produced by changes in liquid level, said changes in liquid level resulting from changes in the volume which occur during mass transfer from the liquid phase to the solid phase during solidification;
- and
- heating means for controlling the temperature within said container responsive to said measured variations in apparent weight.
Dependencies are inferred from the claim text.