Method of forming patterned transparent electro-conductive film on the substrate of liquid crystal display
AssigneeAsahi Glass Company, Limited
InventorsRokuji Oishi, Yasuharu Okajima, Satoshi Noguchi, Kazuyuki Akeyoshi
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Abstract
A paste comprising particles of an inorganic oxide and a vehicle is printed on portions of a substrate which are not to be coated with a transparent electro-conductive film. A low valence oxide film of an electro-conductive metal oxide is deposited on the printed substrate by a vacuum deposition process. The resulting substrate is heated in an atmosphere containing oxygen, whereby the film is oxidized to form a transparent, highly electro-conductive film and the vehicle present in the paste is decomposed to yield a patterned, transparent electro-conductive film on the substrate.
Claims3
A glass substrate having a patterned transparent electroconductive film formed thereon, which coated substrate is used as the electrode plates for liquid crystal display cells, and is prepared by the process, which comprises the steps of:
- printing a paste containing a vehicle which easily decomposes at a temperature of 350.degree.-550.degree. C. on a predetermined portion of said glass substrate and drying said paste;
- coating said substrate with a low valence metal oxide mixture comprising 85-70 wt. % of In.sub.2 O.sub.3 and 15-30 wt. % of SnO.sub.2 by deposition on said printed substrate in a vacuum to form a transparent electroconductive metal oxide coating;
- and
- simultaneously decomposing said vehicle of said paste and oxidizing said low valence metal oxide by heating in the range of 300.degree.-600.degree. C. said coated substrate in an atmosphere containing oxygen.
Dependencies are inferred from the claim text.