Mechanically biased semiconductor strain sensitive microphone
AssigneeInternational Standard Electric Corporation
InventorJohn C. Greenwood
Life of this patent
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Abstract
A piezo-electric transducer element is disclosed which is formed by selected etchings from boron doped silicon. The transducer includes a diaphragm and a spring lever adapted to bias the transducer element into a state of strain so that a vibration of the diaphragm is transmitted to the transducer element. The transducer element is particularly suitable for use in a telephone microphone.
Claims6
A microphone transducer element of the type in which acoustic vibration generates corresponding resistance changes, including:
- at least two semiconductor plate members;
- an integral flexible laminar semiconductor support upon which said plate members are situated;
- and
- at least one laminar semiconductor filament for interconnecting said plate members such that said at least one filament is strain-sensitive.
A microphone assembly comprising:
- housing means;
- flexible diaphrgam means mounted in said housing means;
- semiconductor strain gauge transducer element;
- first and second contact springs for securing said transducer element to said housing;
- spring lever means mounted on said housing proximate to said contact springs for biasing said transducer element into a state of strain;
- and
- fulcrum means mounted on said diaphragm and in abutment with the spring lever means such that acoustic vibrations of the diaphragm are transmitted to said transducer element.
In a telephone subscriber instrument, a microphone assembly comprising:
- housing means;
- flexible diaphragm means mounted in said housing means;
- semiconductor strain gauge transducer element;
- first and second contact springs for securing said transducer element to said housing;
- spring lever means mounted on said housing proximate to said contact springs for biasing said transducer element into a state of strain;
- and
- fulcrum means mounted on said diaphragm and in abutment with the spring lever means such that acoustic vibrations of the diaphragm are transmitted to said transducer element.
Dependencies are inferred from the claim text.